多层增透膜的设计制备与检测  

Design,Preparation and Testing of Multi-Layer Anti-Reflection Film

作　　者：徐群和[1] 

机构地区：[1]浙江工贸职业技术学院电子系,浙江温州325003

出　　处：《浙江工贸职业技术学院学报》2010年第2期60-63,共4页Journal of Zhejiang Industry & Trade Vocational College

摘　　要：发光二极管(LED)是一种极为重要的发光元件,电子仪表显示、照明、光通信等方面有着广泛的应用,但如何将LED所发射的光提取出成为目前LED研发和生产中最重要的问题。通过将多层增透膜构造到LED上,可以有效地提高LED的外量子效率。本文采用真空离子束镀膜方法在玻璃上分别用TiO2颗粒和SiO2颗粒为原料制备针对不同波长的制备多层高反膜和多层高透膜,并通过分光镜对所制备的增透膜进行检测。As an important kind of luminous element,light-emitting diode（LED） is widely applied to electronic instrument display,lighting and optical communication,but it has been the most important question in LED RD and production how to extract the light emitted from LED.Combining multi-layer anti-reflection film to LED may effectively improve the external quantum efficiency of LED.In this article,vacuum ion beam coating method is applied to glass to prepare multi-layer high reflection film and multi-layer anti-reflection film for different wave lengths with TiO2 particle and SiO2 particle as raw materials,and spectroscope is used to test the anti-reflection film prepared.

关 键 词：增透膜 真空镀膜 检测 

分 类 号：TN305.8[电子电信—物理电子学]