高质量多孔氧化铝模板的制备  

Fabrication of high quality ordered porous anodic aluminum oxide templates

作　　者：刘凯[1] 杜凯[1] 陈静[1] 周兰[1] 张林[1] 方瑜[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《强激光与粒子束》2010年第7期1531-1534,共4页High Power Laser and Particle Beams

基　　金：中国工程物理研究院科学技术发展基金项目(2009B0302039);高温高密度等离子体物理国防科技重点实验室基金项目(9140C6805020705)

摘　　要：在草酸电解液中研究了阳极氧化法制备多孔氧化铝模板（AAO模板）。采用场发射扫描电子显微镜对多孔模板的形貌进行表征,结果表明：模板孔的分布均匀有序,孔径在40-70 nm;电解液浓度、氧化电压、氧化温度和氧化时间都会影响模板的形态;不经过高温退火及抛光也可以制得规则排布的多孔AAO模板。X射线衍射分析表明：氧化铝膜的主要成分为非晶态Al2O3。The preparation of porous anodic aluminum oxide（AAO） templates has been studied with oxalic acid as electro- lyte. The morphology of the as-prepared templates has been characterized by field-emission scanning electron microscope（FE- SEM）. The pores distributed orderly and uniformly with the diameter ranging from 40 nm to 70 nm. The experimental results in- dicate that electrolyte concentration, oxidation voltage, oxidation temperature and oxidation time affect the structure of AAO tem- plates. Ordered porous AAO templates can be derived without annealing and finishing. X-ray diffraetion（XRD） analysis indicates that the aluminum oxide film is mainly composed of amorphous Al2O3.

关 键 词：草酸 阳极氧化 阳极氧化铝模板 纳米结构 

分 类 号：TN25[电子电信—物理电子学]