单行载流子光电探测器中空间电荷屏蔽效应理论分析和实验研究  

Theoretical analysis and experimental study of the space-charge-screening effect in uni-traveling-carrier photodiode

作　　者：郭剑川[1] 左玉华[1] 张云[1] 张岭梓[1] 成步文[1] 王启明[1] 

机构地区：[1]中国科学院半导体研究所集成光电子学国家重点实验室,北京100086

出　　处：《物理学报》2010年第7期4524-4529,共6页Acta Physica Sinica

基　　金：国家重点基础研究发展计划(批准号:2006CB302802;2007CB613404)资助的课题~~

摘　　要：本文优化设计和外延生长了一种单行载流子(UTC)光电探测器有源区结构,并且采用微电子工艺制备了台面尺寸为30μm的UTC光电探测器.同时,采用了漂移-扩散模型对该有源区结构进行了理论模拟,从载流子浓度和空间电场角度重点分析研究了空间电荷屏蔽效应对UTC光电探测器直流饱和特性影响的物理机理.UTC光电探测器理论模拟结果与实测数据基本相符.A new optimized structure of an UTC（uni-traveling-carrier） photodiode is developed and epitaxied by metal-organic chemical vapor deposition.We fabricated a UTC photodiode of 30 μm in diameter.Theoretical simulation based on drift-diffusion model was used to analyze the space-charge-screening effect in UTC photodiode primarily in two aspects：the carrier concentrations and the space electric field.The simulation results were generally in agreement with the experimental data.

关 键 词：单行载流子 光电探测器 空间电荷屏蔽效应 

分 类 号：TN36[电子电信—物理电子学]