有序结构氟聚合物压电驻极体的制备和压电性研究  

Preparation and piezoelectricity of fluorocarbon polymer piezoelectret films with ordered void structure

作　　者：孙转兰[1] 张晓青[1] 曹功勋[1] 王学文[1] 夏钟福[1] 

机构地区：[1]同济大学物理系,波耳固体物理研究所,上海200092

出　　处：《物理学报》2010年第7期5061-5066,共6页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:50873078)资助的课题~~

摘　　要：描述了一种有序微孔结构压电聚合物功能膜的制备方法,利用模板的高度有序实现薄膜微孔结构的精确控制.将此制备方法用于氟聚合物压电驻极体薄膜的制备,通过扫描电子显微镜(SEM)对其微观结构的观察表明薄膜具有理想的有序结构.对氟聚合物压电驻极体压电性的研究则是利用正压电效应测量准静态压电系数d33,通过等温衰减和压强依赖性的测量考察其压电性能.结果表明:有序结构氟聚合物压电驻极体的准静态压电系数d33可高达300pC/N;与无序结构氟聚合物压电驻极体薄膜相比较,有序结构薄膜d33的热稳定性有了明显的提高;在～32kPa的压强范围,压电系数d33表现出相当大的压强依赖性,这可能与薄膜的杨氏模量随压强增大而增强有关.A hard template process for preparing piezoelectret films with ordered void structure was described.By using the fabrication process,fluorocarbon polymer piezoelectret film was prepared.The scanning electron microscope（SEM） images showed that the fluorocarbon polymer film piezoelectret has very regular void structure as expected.The piezoelectricity of the fluorocarbon polymer film was investigated by measuring the quasi-static piezoelectric d33 coefficient using positive piezoelectric effect.The thermal stability of d33 was studied by taking the measurement of d33 decay at elevated isothermal temperatures.The results showed that a piezoelectric d33 coefficient of 300 pC /N was achieved.Compared with the fluorocarbon polymer film with disordered void structure,the film with ordered void structure has much improved thermal stability of d33,which can be further improved by pre-ageing treatment.The piezoelectric d33 coefficient is dependent on the applied pressure considerably in the range of 2—35 kPa,which is probably associated with the enhancement of Young＇s modulus of the film with the increasing pressure.

关 键 词：有序结构 氟聚合物 压电驻极体 压电性 

分 类 号：O484.4[理学—固体物理]