波长扫描干涉法动态测量特性的研究  

Analysis on Dynamic Measurement Characteristics of Wavelength Scanning Interferometry

作　　者：王勇[1] 廖延彪[1] 田芊[2] 张敏[2] 章恩耀[2] 

机构地区：[1]清华大学电子工程系 [2]清华大学精密仪器系

出　　处：《激光与红外》1999年第1期56-60,共5页Laser & Infrared

摘　　要：对用于距离绝对测量的波长扫描干涉法的动态测量特性进行了分析。研究结果表明这种方法特别适用于缓变距离的测量或长期监测，而对于较快速变化的距离测量，本文给出了其运动速度的限制。The dynamic measurement characteristics of a novel wavelength scanning interferometer for absolute distance measurement are analyzed in terms of theory.It's seen that this system is suitable for slowmoving and long term distance measurement,instead of a fast variation in distance.The velocity limit is deduced under a given measurement accuracy,which is important for practical applications of the system.

关 键 词：波长扫描 光纤干涉仪 绝对距离 动态测量 

分 类 号：TH744.306[机械工程—光学工程]