Fabrication of 17×17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique  

作　　者：秦政坤 贺飞 刘春玲 王立忠 马春生 

机构地区：[1]College of Information and Technology,Jilin Normal University [2]State Key Laboratory of Integrated Optoelectronics

出　　处：《Journal of Semiconductors》2010年第7期29-31,共3页半导体学报（英文版）

基　　金：Project supported by the National Natural Science Foundation of China(No.60576045).

摘　　要：Arrayed waveguide grating（AWG） is a key device in the wavelength-division multiplexing（WDM） system, and the flat spectral response of the AWG device is required.In this paper,the RIE process has been improved.By using the steam-redissolution technique,the insertion loss and the crosstalk have been reduced.Experimental results show that the central wavelength is 1550.86 nm,the channel spectral response flatness is about 1.5 dB,3-dB bandwidth is about 0.478 nm,insertion loss is 10.5 dB,and crosstalk is about-22 dB.The insertion loss of an AWG device is reduced by about 3 dB for the central channel and 4.5 dB for the edge channels,and the crosstalk is reduced by 2.5 dB after the steam-redissolution.Arrayed waveguide grating（AWG） is a key device in the wavelength-division multiplexing（WDM） system, and the flat spectral response of the AWG device is required.In this paper,the RIE process has been improved.By using the steam-redissolution technique,the insertion loss and the crosstalk have been reduced.Experimental results show that the central wavelength is 1550.86 nm,the channel spectral response flatness is about 1.5 dB,3-dB bandwidth is about 0.478 nm,insertion loss is 10.5 dB,and crosstalk is about-22 dB.The insertion loss of an AWG device is reduced by about 3 dB for the central channel and 4.5 dB for the edge channels,and the crosstalk is reduced by 2.5 dB after the steam-redissolution.

关 键 词：arrayed waveguide grating flat spectral response steam-redissolution 3-dB bandwidth CROSSTALK 

分 类 号：O436.1[机械工程—光学工程]