介质阻挡放电等离子体射流装置的实验研究  

Experiment Study on the Dielectric Barrier Discharge Plasma Jet

作　　者：马跃[1] 张冠军[1] 许桂敏[1] 李娅西[1] 李倩[1] 

机构地区：[1]西安交通大学电力设备电气绝缘国家重点实验室,陕西西安710049

出　　处：《高压电器》2010年第7期36-40,共5页High Voltage Apparatus

基　　金：国家优秀博士论文基金(批准号:200338);新世纪优秀人才支持计划项目(NCET-04-0943)

摘　　要：基于介质阻挡放电的形式,设计并制作了两种等离子体射流装置:一种内电极裸露;另一种内电极覆盖有石英玻璃。笔者对两种不同电极等离子体射流装置的特性进行了测量。在中频正弦电源通入Ar的情况下,测量了放电的李萨如(Lissajous)图、放电的图像和放电的光谱图;并且分别由放电的Lissajous图和光谱图,计算得到了放电的功率和电子激发温度。实验结果表明:在外施电压保持不变的情况下,气流对于放电的功率和电子的温度几乎没有影响;通过对比两种射流装置的电学和光学特性发现,与内电极覆盖有石英玻璃的等离子体射流装置相比,内电极裸露的情况下,其放电的功率和电子激发温度均比较大。Based on the form of dielectric barrier discharge （DBD）,two plasma jets were designed and produced. One plasma jet＇s inner electrode was bared,and the other＇s inner electrode was covered with quartz glass. The characteristics of two different plasma jets with mid-frequency sinusoidal power were measured. The Lissajous figures,images and optical spectrum of DBD were acquired,when Ar was inlet. The discharge power and electron excitation temperature were investigated through Lissajous figures and optical spectrum,respectively. The experimental results were shown that,when under the same applied voltage,the electron excitation temperature didn＇t change with the Ar flow rate. Through investigating the two plasma jets＇electricity and optical characteristics,it was found that,compared to the inner electrode covered with quartz glass plasma jet,the bare inner electrode plasma jet had bigger discharge power and higher electron excitation temperature.

关 键 词：介质阻挡放电 等离子体射流 Lissajous图 光谱 电子激发温度 

分 类 号：TP61[自动化与计算机技术—控制理论与控制工程]