Design and Analysis of the Power Drive Module for Ultrahigh Vacuum Wafer-Transfer Robot  

作　　者：H.C. Chen S.M. Huang 

机构地区：[1]Chung Shan Institute of Science and Technology, Taoyuan 325, Taiwan [2]Department of Mechanical Engineering, National United University, Miaoli 360, Taiwan

出　　处：《Journal of Energy and Power Engineering》2010年第6期55-59,共5页能源与动力工程（美国大卫英文）

摘　　要：To meet stringent requirements in vacuum and cleanness for semiconductor manufacturing, a new power drive module for Selective Compliant Assembly Robot Arm （SCARA） type robot has been developed for wafer-transfer. In order to obtain complete hermetic volume for higher vacuum and prevent leakage of hazardous gases, feedthrough motions involving transfer between the vacuum and motors are achieved by the use of metal bellows and magnetic coupling. An analysis of the coaxial-type magnetic coupling by employing the technique of current sheet model is presented. This approach is proved to be a precise and easy method. The construction of power drive module shows its advantage in maintaining ultrahigh vacuum and also enhances the efficiency for transporting the wafer, as compared with conventional design.

关 键 词：Power drive ROBOT ultrahigh vacuum magnetic coupling. 

分 类 号：TP242[自动化与计算机技术—检测技术与自动化装置] TB771[自动化与计算机技术—控制科学与工程]