采用微刀具的菲涅耳器件超精密制造方法  

Ultra-precision machining of Fresnel elements fabricated by micro tools

作　　者：张效栋[1] 房丰洲[1] 程颖[1] 徐宗伟[1] 张少婧[1] 魏桂爽[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室天津微纳制造工程技术中心,天津300072

出　　处：《红外与激光工程》2010年第3期502-505,共4页Infrared and Laser Engineering

基　　金：国家863高技术研究发展计划资助项目(2009AA044305;2009AA044204);国家自然基金重大研究计划资助项目(90923024;90923038)

摘　　要：菲涅耳器件是红外传感器等领域不可或缺的高性能光学元件。其高效和高精度的制造方法是目前研究的重点。文中借助单点金刚石切削技术实现菲涅耳器件加工,采用半圆头型刀具有效减小不可切削区域,并基于聚焦离子束微加工方法进行微刀具制备。对所提出方法的关键技术和制造工艺进行了详细论述。对不同应用领域的两类菲涅耳器件进行加工实验,并建立光学测试平台进行光学性能分析,实验结果表明:所提出的方法可满足菲涅耳器件的应用需求。Fresnel elements are the key components of high performance systems in many fields, such as IR sensor. The high-efficient and ultra-precision manufacture method of Fresnel elements is focused by many researchers currently. The single point diamond cutting was applied to machine the Fresnel elements in this paper. Flatted micro tools were proposed as the fabricating tools of cutting the Fresnel elements in order to reduce the unmachinable area. The micro tools were machined by the Focus Ion Beam （FIB） method. The key techniques and fabrication processes of the proposed method were discussed in details. Experiments of machining and testing were implemented for two kinds of Fresnel elements in different applications, which show that the proposed method satisfies with the application requirement of Fresnel elements efficiently.

关 键 词：菲涅耳镜加工 超精密车削 微刀具 

分 类 号：TH162.1[机械工程—机械制造及自动化]