声表面波传感技术用于微液滴尺寸检测的研究  

Study on micro liquid detection using surface acoustic wave

作　　者：张学典[1] 徐张恒[1] 鲁敦科[1] 常敏[1] 

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093

出　　处：《上海理工大学学报》2010年第3期273-276,共4页Journal of University of Shanghai For Science and Technology

摘　　要：为了实现微液滴大小的检测，设计了一种基于声表面波技术的液相传感检测系统，并对5～10μL的微水滴大小进行了检测．实验结果表明：声表面波的幅度衰减与微液滴的大小之间存在相关性，相关系数在0．9以上，证明了声表面波技术用于微液滴大小检测的可行性．同时还发现，在相同的条件下，对大小相同而黏性不同的微水滴和微油滴进行检测，声表面波的变化趋势和衰减程度不同，说明液相的黏性会在一定程度上影响声表面波的传输．A liquid detection system based on a surface acoustic wave （SAW） technique was devel- oped in order to detect the size of the micro liquid droplets. Micro water droplets with the size of 5 to 10μL were measured. The experimental results showed that good correlation is found between the amplitude of SAW and the size of the liquid droplets, correlation coefficient is greater than 0.9, which proves the feasibility of the micro-droplet size measurement using the SAW technique. It has been found that the change trends of SAW amplitude transformation are different when micro water droplet and micro oil droplet with the same size but with different viscosity are measured under the same condition. The results also indicates that the viscosity of liquid droplet have some effect on the amplitude transformation of the SAW.

关 键 词：声表面波 微液滴 黏性 

分 类 号：TH832.1[机械工程—仪器科学与技术]