基于石英晶体微天平的聚醚酰亚胺湿度传感器  

Development of Humidity Sensor with Quartz Crystal Microbalance Coated with Polyethyleneimine

作　　者：李先懿[1] 莫晓亮[1] 陈国荣[1] 

机构地区：[1]复旦大学材料科学系,上海200433

出　　处：《真空科学与技术学报》2010年第4期355-358,共4页Chinese Journal of Vacuum Science and Technology

基　　金：上海市科委基金(09DZ1142102;0752nm016)

摘　　要：研制了基于石英晶体微天平方法的聚醚酰亚胺湿度传感器,研究了它对相对湿度的响应特性和灵敏度以及这种湿度传感器在高湿度对比下的循环特性和长期老化性能。结果表明:在较宽的湿度范围内,这种湿度传感器表现出良好的湿敏特性。当相对湿度从11%变化至95%时,频率变化达2000Hz。高湿度差对比下的响应时间和恢复时间分别为30和20s。在循环测试和长时间老化测试中,也表现出优良的重复性和稳定性。A novel type of humidity sensor was developed based on the quartz crystal microbalance coated with Polyethyleneimine （PEI）.Its various aspects,such as its relative humidity （RH） response characteristics,its sensitivity,its cyclic characteristics at a fairly high relative humidity contrast,and its long-term aging performance,were experimentally evaluated.The results show that the PEI coated humidity sensor works pretty well in a wide range of humidity.In addition,as the relative humidity varies from 11% to 95%,its frequency shift is 2,000 Hz,and at an abrupt change in the relative humidity,the response and recover times of the sensor were found to be about 30 and 20 s,respectively.The many strengths of the newly-developed sensor include high sensitivity,good reproducibility,and satisfactory stability in cycling and aging tests.

关 键 词：湿度传感器 石英晶体微天平 聚醚酰亚胺 频率响应 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]