17-4PH不锈钢表面TiO2膜及其多层膜的结构与性能  

Structure and Properties of TiO_2 Film on 17-4PH Stainless Steel Surface and Its Multilayer Film

作　　者：吴艳萍[1] 冷永祥[1] 孙鸿[1] 黄楠[1] 

机构地区：[1]西南交通大学材料先进技术教育部重点实验室,材料科学与工程学院,成都610031

出　　处：《机械工程材料》2010年第7期53-56,共4页Materials For Mechanical Engineering

基　　金：教育部新世纪人才计划资助项目(NCET-06-0800);四川省杰出青年学科带头人培养资助计划资助项目(06ZQ026-015)

摘　　要：利用非平衡磁控溅射技术在17-4PH不锈钢表面分别制备了TiO_2膜、TiO_2/Ti多层膜及TiO_2/Ti/TiN/Ti多层膜,采用XRD、表面轮廓仪、显微硬度仪、摩擦磨损试验机和水蒸气疲劳腐蚀试验设备研究了薄膜的物相、显微硬度、耐磨性和耐疲劳腐蚀性能。结果表明:具有表面薄膜17-4PH不锈钢的硬度、耐磨性和耐腐蚀性能均有较大提高;与TiO_2膜和TiO_2/Ti/TiN/Ti多层膜相比,TiO_2/Ti多层膜耐磨性能最好,较基体的提高了20倍以上,同时其耐疲劳腐蚀性能也最好。The TiO2 single-layer film, TiO2/Ti and TiO2/Ti/TiN/Ti multilayer films were prepared on the 17-4PH stainless steel by unbalance magnetron sputtering. The phase composition, microhardness, wear resistance and antifatigue corrosion resistance of the films were investigated by using X-ray diffraction, profilemeter, rickets microhardness tester, friction and wear tester and steam corrosion fatigne test equipment. The results indicate that the hardness, wear resistance and corrosion fatigue resistance of the 17-4PH stainless steel with surface film were greatly improved. Compared with the TiO2 single-layer film and the TiO2/Ti/TiN/Ti multilayer film, the TiO2/Ti multilayer film had the best wear resistance which was increased by 20 times. The antifatigue corrosion resistance of the multilayer film was the best.

关 键 词：Ti02/Ti多层膜 TIO2膜 耐磨性 耐腐蚀性 

分 类 号：O484[理学—固体物理]