变包含角平面光栅单色器扫描转角精度的检测  

Rotation-angle-accuracy measurement of scanning mechanism in variable included angle plane grating monochromater

作　　者：卢启鹏[1] 马磊[1,2] 彭忠琦[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033 [2]中国科学院研究生院,北京100039

出　　处：《光学精密工程》2010年第7期1548-1553,共6页Optics and Precision Engineering

基　　金：国家重大科学工程上海光源工程项目(No.SS-06;O7093XQ070);应用光学国家重点实验室开放基金资助项目(No.O9Q33FQ091)

摘　　要：针对上海光源(SSRF)软X射线谱学显微光束线站高分辨变包含角单色器(VAPGM)在超高真空环境下对波长扫描机构转角精度的现场测试,提出了一种实用、有效的检测方法。采用自制的多角棱镜,结合高精度光电自准直仪进行现场测试。首先,介绍了单色器波长扫描原理,给出角度与波长的关系;接着,理论分析了转角精度与系统分辨率之间的关系;最后,介绍了该方法的检测原理、装置及检测步骤。利用该方法完成了VAPGM平面镜(PM)和平面光栅(PG)转角精度的检测,结果分别为0.19″,0.22″,满足单色器技术指标要求。在电离室在线检测了标定后的单色器系统的分辨率,测试结果好于10000,进一步验证了该检测方法的有效性。A simple,practical,and effective method for measuring the rotation-angle-accuracy of the wavelength scanning mechanism in a Variable Included Angle Plane Grating Monochromator （VAPGM） was proposed in an ultra-high vacuum environment.The method was achieved by using a special angle mirror and a high-precision photoelectric autocollimator.Firstly,the relationship between angle and wavelength was described on the basis of the principle of VAPGM wavelength scanning.Then,the dependence of rotation-angle-accuracy on system resolution was analyzed.Finally,the principle,devices and steps of the method were introducted in detail.By using this method,the rotation-angle-accuracies of the Plane Mirror （PM） and the Plane Grating （PG） were measured,and the results show that they are 0.19″and 0.22″,respectively,which fulfills the technical requirements of VAPGM.The resolution power of this monochromator was tested by an ionization chamber after measuring the rotation-angle-accuracy,and the result is superior to 10000.The experimental result further verifies that the method is effective.

关 键 词：同步辐射 变包含角单色器 波长扫描机构 转角精度 多角棱镜 

分 类 号：TH744.1[机械工程—光学工程] TB92[机械工程—仪器科学与技术]