非球面变形抛光盘变形能力分析  

Deformation Capability Analysis of Deformable Aspheric Polishing Lap

作　　者：胡自强[1,2] 凌宁[2] 潘君骅[3] 姜文汉[2] 

机构地区：[1]烟台大学光电信息学院,山东烟台264000 [2]中国科学院成都光电所,四川成都610209 [3]苏州大学现代光学技术研究所,江苏苏州215006

出　　处：《压电与声光》2010年第4期582-584,共3页Piezoelectrics & Acoustooptics

基　　金：山东省光电信息重点实验室基金资助项目(GD05Z03);烟台大学科研基金资助项目(WL09B32)

摘　　要：基于压电陶瓷驱动器的非球面变形抛光盘,能在驱动器的作用下改变面形,用于中小口径非球面镜加工。一个口径100 mm、含19个驱动器的非球面变形抛光盘已试制完毕,用于一个口径350 mm、非球面系数k=-1.112 155、顶点半径R=840 mm双曲面镜的加工实验。为研究基于压电陶瓷驱动器的非球面变形抛光盘输出面形的精度,计算当非球面变形抛光盘中心到非球面工件中心距离L分别为90 mm、100 mm、110 mm、120 mm和130 mm时,非球面变形抛光盘所需变形量;并利用有限元分析法仿真计算得到,非球面变形抛光盘输出面形的剩余残差(RMS)相应分别为0.298μm、0.279μm、0.279μm、0.329μm、0.447μm。结果表明,变形抛光盘能以较高精度产生非球面面形,可用于非球面镜加工。The deformable polishing lap based on PZT actuator can change the lap surface continuously to fit the surface of middle aperture aspheric optical mirrors at any location.A diameter 100 mm deformable polishing lap consisted of 19 PZT actuators had been designed and manufactured,which is being used to polish a hyperboloid mirrorwith bore dimension of 350 mm,aspheric coefficient k=-1.112 155 and the top semidiameter R=840 mm.In order to analyze deformation capability of the deformable polishing lap,the needed deformations were calculated and residual errors were analyzed by the finite element method,when the distance from the deformable polishing lap to the hyperboloid mirror center L was 90 mm,100 mm,110 mm,120 mm and 130 mm respectively.The results showed that the residual error（RMS） of the deformable aspheric polishing lap was 0.298 m,0.279 m,0.279 m,0.329 m and 0.447 m respectively.The deformable polishing lap can reshape fine quadratic curved face and enable it to be used in manufacturing aspheric optical mirrors.

关 键 词：非球面镜 非球面变形抛光盘 变形 有限元分析 

分 类 号：TH74[机械工程—光学工程]