多功能测头光学系统设计  

Design of Optical System for Multifunctional Detector

作　　者：赵念念[1] 朱凌建[1] 赵敏[1] 黄秋红[1] 

机构地区：[1]西安理工大学机械与精密仪器工程学院,陕西西安710048

出　　处：《西安理工大学学报》2010年第2期212-217,共6页Journal of Xi'an University of Technology

基　　金：陕西省教育厅自然科学研究基金资助项目(09JK684)

摘　　要：提出了一种用于三坐标测量机的新型多功能测头,介绍了多功能测头光学系统的设计思路,分析了光路中光学元件的作用,计算了光学元件主要参数,并进行了多功能测头的实验验证。大量实验结果表明,该测头经过标定,激光跟踪瞄准重复性测量的不确定度在±1μm以内,激光跟踪瞄准被测曲面倾角可以达到30°,能满足三坐标测量机的使用要求,同时也可以用于其它测长仪器对自由曲面进行快速精确的瞄准以及对零件轮廓的图象法测量。A new multifunctional detector applied to Coordinate Measuring Machine（CMM） is described in this paper.The designing concept of the detector＇ s optical system is introduced in detail.The functions and main parameters of optical components in the optical trajectory are analyzed and calculated.Some test experiments of new multifunctional detector are conducted and verified in practice.Laboratory experiments results show that the measurement uncertainty of laser tracking aiming repeatability of the multifunctional detector is ±1 μm after the calibration.The curved surface inclination measured by laser tracking aim can reach 30° and satisfy the application requirements of the coordinate measuring machines（CMMs）.And at the same time,it can be used in other length measuring instruments to carry out the fast tracking aim at the free curved surface as well as in image measuring of part profiles with high precision.

关 键 词：光学系统 电荷耦合器件(CCD) 半导体激光器 两象限硅光电二极管 

分 类 号：TH71[机械工程—测试计量技术及仪器]