轴力对吸合电压影响分析的一种近似方法  

APPROXIMATE METHOD TO ANALYSE THE EFFECT OF AXIAL ON PULL-IN VOLTAGE

作　　者：曹天捷[1] 丁芳[2] 

机构地区：[1]中国民航大学交通工程学院,天津300300 [2]中国民航大学航空自动化学院,天津300300

出　　处：《机械强度》2010年第4期632-638,共7页Journal of Mechanical Strength

摘　　要：利用积分中值定理,提出两端固支梁中轴力的近似分析方法,结合几种满足位移边界条件的位移函数,推导两端固支梁中轴力的近似计算公式,并将这些计算公式应用于分析两端固支微机电开关梁的吸合电压中。计算实例中,针对一些不同的梁长、不同的梁厚、不同的驱动电极长以及不同的初始间隙,通过比较几种不同的轴力公式得出的吸合电压计算结果可见,选用余弦位移函数计算轴力时,文中提出的考虑轴力时吸合电压的计算结果精度较高。另外,影响相对误差大小的主要因素是梁厚和初始间隙,而梁长对相对误差的影响很小。An approximate method to consider the axial force in a fixed-fixed beam was presented based on the intermediate value theorem of integral. A few displacement functions satisfying displacement boundary conditions were used to derive the approximate formula of the axial force in the fixed-fixed beam, and the formula were utilized to analyze the pull-in voltage of the fixed-fixed MEMS（miero- electro-mechanical system） switch. In examples the pull-in voltages were calculated for different lengths and depths of the beam, different lengths of actuating electrodes and different initial gaps. From the results of the pull-in voltage to different approximate formula it can be seen that when cosine function is utilized to calculate the axial force the pull-in voltage is more accurate. In additional, the relative error is affected mainly by the depth of the beam and the initial gap, and the length of the beam has almost no effect on the relative error.

关 键 词：微机电开关 两端固支梁 吸合电压 位移函数 轴力 

分 类 号：O39[理学—工程力学]