气相沉积法的薄膜制备研究  

Review of Thin Films Preparation Methods by Thermal Vapor Condensation

作　　者：陈晖[1] 周细应[1] 言智[1] 

机构地区：[1]上海工程技术大学材料工程学院,上海201600

出　　处：《上海工程技术大学学报》2010年第2期167-172,共6页Journal of Shanghai University of Engineering Science

摘　　要：对薄膜的应用现状、气相沉积法制备薄膜的常规方法及高能精密薄膜制备方法作了综述.认为开发薄膜复合处理工艺,实现制膜过程精密控制,以及节能环保的绿色镀膜将会成为薄膜制备新的趋势.The application status of thin films,conventional methods of thin films preparation by thermal vapor condensation and other high precison preparation methods were reviewed.It is presented that the development of thin films composite processing,the precise control of preparation processing as well as engergy-saving and environment-protecting film-plating methods will be the new trend of thin films preparation.

关 键 词：薄膜 气相沉积法 绿色镀膜 

分 类 号：TB43[一般工业技术]