基于并口通信的多晶薄膜沉积装置  

The Design of Polycrystalline Thin Film Deposition Apparatus Based on PC's Parallel Communication

作　　者：么忆权 

机构地区：[1]北京遥感设备研究所,北京100854

出　　处：《微计算机信息》2010年第23期166-168,共3页Control & Automation

摘　　要：阐述了在Windows XP下利用计算机并口读取数字信号和发出控制指令的方法,给出了多晶沉积装置中所需要的测温电路、接口电路和控制电路。根据计算机并口通信要求,设计了驱动程序和应用程序。在多晶薄膜沉积装置中的应用表明该设计方法简便合理可靠性高。This paper presents a method of reading the digital signals and sending control-instruction in Windows XP,and gives the design of interface circuit,temperature measurement circuit and control circuit.Accroding to the demand of PC＇s parallel communication,windows driver and application programs are designed.The method has been applied in polycrystalline thin film deposition apparatus ,and it shows that the design of the method is easy,reasonable and highly stable.

关 键 词：多晶薄膜 并口通信 计算机控制 

分 类 号：TN7[电子电信—电路与系统] TP31[自动化与计算机技术—计算机软件与理论]