冷等离子体冶金中的粒子输运现象研究  

Study on the Transport Phenomena of Particles in Cold Plasma in Metallurgic Process

作　　者：尹盛[1] 何笑明[1] 王宇[1] 王敬义[1] 

机构地区：[1]华中理工大学电子科学与技术系

出　　处：《华中理工大学学报》1999年第3期1-3,共3页Journal of Huazhong University of Science and Technology

基　　金：国家自然科学基金

摘　　要：介绍了冷等离子体冶金效应的实验方法和结果，列出了反应粒子的输运方程，较详细地分析了它们之间的耦合关系．在讨论输运方程的求解过程中，证明各种粒子的输运速率是与提纯效果紧密相关的．提供了对硅的提纯结果和工艺参数。The metallurgic effect in cold plasma is introduced. The transport equation scoupled with the macro scopic trchnology parameters are listed for the reaction particles. The analyses and calculation for the equations show that the results can be used for getting the purity effects. The technology parameters and the purity results for Si are provided, and the calculation result of transport rate for Cl is also given in this paper, showing that this metallurgic effect could be used in the pruity of solar grade Si.

关 键 词：等离子体冶金 冷等离子体冶金 粒子输运方程 

分 类 号：TF19[冶金工程—冶金物理化学]