大视场角1/4对称膜系偏光分束镜的研究  

Quarter symmetric periodic multilayer wide-angle polarizing beam splitter

作　　者：齐瑞云[1] 吴福全[1] 王庆[1] 郝殿中[1] 吴闻迪[1] 

机构地区：[1]曲阜师范大学激光研究所,山东省激光偏光与信息技术重点实验室,山东曲阜273165

出　　处：《光电子．激光》2010年第8期1167-1170,共4页Journal of Optoelectronics·Laser

基　　金：山东省教育厅科技计划资助项目(J06P06)

摘　　要：为了增大薄膜偏光分束镜(PBS)的视场角,从对称膜系等效折射率公式和截止带理论出发,设计了对称膜系结构的大视场角PBS。利用电子枪蒸镀法制备了低高低折射率(LHL)膜系结构的PBS,利用UV3101-PC分光光度计测量了PBS在不同入射角下的透射分光光谱,通过消光比测试系统测量了PBS反射光和透射光的消光比。结果表明,偏光分光光谱随入射角变化不明显,在视场角范围内具有较好的消光比(10-3量级),实验结果与理论设计一致。由此可见,利用周期性对称膜系设计大视场角薄膜PBS是完全可行的,为研制大视场角薄膜PBS提供了新的设计方法。In order to improve the view angle of thin film polarizing beam splitter（PBS）,based on the equivalent refractive index formula of symmetric film system and the stop-band theory,we design a periodic multilayer PBS with wide angle.Electron beam evaporation method is used to fabricate LHL periodic multilayer PBS.UV3101-PC spectrophotometer is used to measure the transmittance spectrum of PBS at different incidence angles,A test system is set up to test the extinction ratios of the PBS.The results show that the split spectrum of the PBS does not change significantly with the incidence angles and that in the range of the view angles has high extinction ratio（10-3 magnitude）.The experiment results agree well with the theoretical design.It is entirely feasible that periodic symmetric coating is used to design wide view angle PBS.The method provides a new design approach to fabricate wide view angle thin film PBS.

关 键 词：薄膜光学 偏光分束镜(PBS) 视场角 分光光谱 消光比 

分 类 号：O436.3[机械工程—光学工程]