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作 者:何平笙[1] 周悦 金邦坤[1] 丛树昕 李春娥[1] 杨碚芳[1] 蔡维理[1] 阮耀钟
机构地区:[1]中国科学技术大学
出 处:《功能高分子学报》1999年第1期23-27,共5页Journal of Functional Polymers
基 金:国家自然科学基金
摘 要:聚酰胺酸N,N-二甲基十八铵盐LB膜具有严格排列的周期结构,其亚胺化可以在比聚酰胺酸更为温和的条件下进行。测定了沉积在单晶硅片上的聚酰亚胺涂膜的热分解性能。于真空和高温下聚酰亚胺LB膜会热解并与基片硅反应而生成规则结构的SiC准单晶膜。Polyimide LB films could been obtained from its precursor poly(PMDA-ODA) N,N-dimethyloctadecyamine LB films. The structure of the precursor LB films was studied by means of infrared and X-ray diffraction.The linear relationship of infrared absorption with layer number of LB films and regular X-ray diffraction peaks showed that the LB films have regular periodic structure. The inclination angle of the molecules relative to the normal direction of substrate was also estimated and was 39°. FT-IR results showed that there existed stronger orientation of molecules during the deposition of the LB films. The imidization of poly(PMDA-ODA) N,N-dimethyloctadecyamine LB films might be carried out under more moderate conditions than polyamic acid .The pyrolysis properties of polyimide LB films were carried out by TG-DTG and DTA.The SiC crystal film could be obtained by the reaction of silicon substrate with the regular carbon molecules remained by the pyrolysis of polyimide LB film deposited on single silicon wafer at high temperature and in vacuum.
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