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机构地区:[1]Sichuan Institute of Solid-State Circuits,CETC [2]National Laboratory of Analog ICs
出 处:《Journal of Semiconductors》2010年第8期70-73,共4页半导体学报(英文版)
摘 要:A novel depletion-mode NJFET compatible high-voltage BiCMOS process is proposed and experimentally demonstrated with a four-branch 12-bit DAC(digital-to-analog converter).With this process,an NJFET with a pinch-off voltage ofabout-1.5 V and a breakdown voltage of about 16 V,an NLDDMOS(N-type lightly-dosed-drain in MOS) with a turn-on voltage of about 1.0 V and a breakdown voltage of about 35 V,and a Zener diode with a reverse voltage of about 5.6 V were obtained.Measurement results showed that the converter had a reference temperature coefficient of less than±25 ppm/℃,a differential coefficient error of less than±0.3 LSB,and a linear error of less than±0.5 LSB.The depletion-mode NJFET and its compatible process can also be widely used for high-voltage ADCs or DACs.A novel depletion-mode NJFET compatible high-voltage BiCMOS process is proposed and experimentally demonstrated with a four-branch 12-bit DAC(digital-to-analog converter).With this process,an NJFET with a pinch-off voltage ofabout-1.5 V and a breakdown voltage of about 16 V,an NLDDMOS(N-type lightly-dosed-drain in MOS) with a turn-on voltage of about 1.0 V and a breakdown voltage of about 35 V,and a Zener diode with a reverse voltage of about 5.6 V were obtained.Measurement results showed that the converter had a reference temperature coefficient of less than±25 ppm/℃,a differential coefficient error of less than±0.3 LSB,and a linear error of less than±0.5 LSB.The depletion-mode NJFET and its compatible process can also be widely used for high-voltage ADCs or DACs.
关 键 词:depletion-mode NJFET high-voltage BiCMOS process ADC DAC temperature coefficient
分 类 号:TN433[电子电信—微电子学与固体电子学]
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