TiO_2-SnO_2薄膜的湿敏性能研究  

Study on Humidity Sensing Properties of TiO_2-SnO_2 Thin Films

作　　者：韩志萍[1] 闫龙[1] 王玉飞[1] 史志铭[2] 

机构地区：[1]榆林学院化学与化学工程学院,榆林719000 [2]内蒙古工业大学材料科学与工程学院,呼和浩特010051

出　　处：《硅酸盐通报》2010年第4期903-907,共5页Bulletin of the Chinese Ceramic Society

基　　金：国家自然科学基金项目(50562003);陕西省科技研究发展计划项目(2009K06-26);陕西省教育厅科学研究计划项目(09JK843);榆林市科技计划项目(gygg200812)

摘　　要：采用溶胶-凝胶工艺在印有梳状银电极的石英玻璃表面制备了不同含量Sn2+掺杂的氧化钛薄膜,通过烧结制得一系列湿敏元件,研究了Sn2+掺杂量、烧结温度和工作频率对薄膜湿敏性能的影响。研究表明,较低的工作频率下元件的湿敏性能较好;Sn2+的加入不同程度地降低了TiO2基薄膜的阻抗值,其中TiO2-15wt%SnO2薄膜表现出最高的灵敏度;薄膜高的湿敏性能与Sn2+掺杂引起的晶粒度变化以及热处理过程中的晶型转变有关。The Sn^2＋ doped Titania thin films were prepared on the substrates of the quartz glass with the silver comb-like electrodes by the sol-gel method and then a series of humidity sensors were installed by the sintering process. The effects of Sn^2＋ dopant, sintering temperature and work frequency on humidity sensing properties of the films were investigated. Experimental result shows that, a well humidity sensitivity of the sensors was obtained at lower frequency; the addition of Sn^2＋ improved the linearity of impedance vs relative humidity （RH） to some extent. The TiO2-15wt% SnO2 film exhibits the highest sensitivity for the humidity. Moreover, the good humidity sensitivity is due to the change of crystal size caused by Sn^2＋ doped and the crystal transformation in heat treatment process.

关 键 词：氧化钛 薄膜 湿度敏感 离子掺杂 

分 类 号：O484[理学—固体物理]