沉积参数对ICF靶丸辉光放电聚合物烧蚀涂层红外特性的影响  

Effect of Parameters on Infrared Characteristic of Glow Discharge Polymer Coating for Laser Fusion Targets

作　　者：阳志林[1,2] 何智兵[1] 卢铁城[2,3] 宋之敏[2] 闫建成[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900 [2]四川大学物理科学与技术学院辐射物理及技术教育部重点实验室,四川成都610065 [3]中国科学院国际材料物理中心,辽宁沈阳110015

出　　处：《原子能科学技术》2010年第8期941-947,共7页Atomic Energy Science and Technology

基　　金：国家高技术"863"计划资助项目

摘　　要：采用低压等离子体聚合装置,在溴化钾单晶盐片上制备了气压、功率、反式二丁烯(T2B)与氢气流量比3个沉积参数系列的辉光放电聚合物(GDP)涂层。对3个系列涂层各自的红外光谱进行比较分析,结合高斯拟合,定量地讨论涂层内部SP3(CHx)与SP2(CHx)键的相对含量的变化规律,且探讨了各系列沉积参数对气体分子在等离子体发生区的离解效率和沉积过程活性粒子与涂层新生表面及亚表面相互作用的影响。结果表明,在低气压、较高功率和低流量比参数下,GDP涂层内SP3(CH3)和氢元素的含量相对较低,SP2(CH2)和碳元素的含量相对较高。The glow discharge polymer（GDP）coatings with the thickness from 1 to 2.5 μm were deposited at KBr crystal substrate with different parameters.Infrared characteristic and H/C ratio of GDP coatings were characterized by Fourier transform infrared absorption spectroscopy and element analysis,respectively.The effects of parameters on the ratio of SP3（CHx）and SP2（CHx）were investigated.Based on the infared results,the influence of parameters on discharge efficiency of gas was discussed.The interaction between the active segments and the surface was analyzed in the deposition process.With pressure decreasing,the proportion of the SP3（CH3）and H element will decrease,while the proportion of the SP2（CH2）and C element will increase.Increasing the radio frequency power or the ratio of T2B and H2 can get the same result.

关 键 词：辉光放电聚合物涂层 红外吸收谱 反式二丁烯 

分 类 号：O469[理学—凝聚态物理]