不同参数对GDP薄膜的结构与力学性能的影响  

Effects of Parameters on Structure and Mechanical Properties of Glow Discharge Polymer Films

作　　者：何智兵[1] 阳志林[1] 闫建成[1] 张林[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《原子能科学技术》2010年第8期989-994,共6页Atomic Energy Science and Technology

基　　金：国家高技术研究发展计划资助项目

摘　　要：采用辉光放电等离子体聚合技术,在不同制备参数条件下,制备了辉光放电聚合物(GDP)薄膜。利用傅里叶变换红外吸收光谱对GDP薄膜的化学结构组成进行了分析,采用纳米压痕技术对GDP薄膜的硬度及杨氏模量进行了表征,探讨了GDP薄膜的化学结构组成、硬度及杨氏模量随制备参数的变化规律。研究表明:随着工作气压和反式二丁烯与氢气(T2B/H2)流量比逐渐降低,GDP薄膜中SP3(CH3)基团随之降低,SP2(CH2)基团含量和SP3(CH1,2)随之增加;GDP薄膜的硬度与杨氏模量随着工作气压、T2B/H2流量比的降低而逐渐增大。The glow discharge polymer（GDP）films were fabricated by plasma polymerization technology at various parameters.The chemical structure of GDP films was characterized by Fourier transform infrared（FT-IR）spectrum.The hardness and modulus of GDP films were measured by nanoindentation.It is found that when work pressure and T2B/H2 flow ratio gradually decrease,SP3（CH3）group decreases,while SP2（CH2）and SP3（CH1,2）group increase in the GDP films.The hardness and modulus of GDP films increase with decreasing pressure and T2B/H2 flow ratio.The hardness and modulus of GDP films are mainly influenced by such factors as SP3（CH3）group,branched chain,double bond content and degree of cross-linking of carbon network in GDP films.

关 键 词：辉光放电聚合物 FT-IR光谱 纳米压痕 力学性能 

分 类 号：TB322[一般工业技术—材料科学与工程]