长脉冲激光切割蓝宝石的断口分析  

Analysis of Fracture Surface for Sapphire Cut by Long Pulse Laser

作　　者：李长青[1] 武万良[1] 左洪波[2] 张明福[2] 

机构地区：[1]黑龙江科技学院材料科学与工程学院,哈尔滨150027 [2]哈尔滨工业大学复合材料与结构研究所,哈尔滨150001

出　　处：《人工晶体学报》2010年第4期997-1001,1007,共6页Journal of Synthetic Crystals

基　　金：总装瓶颈项目(Z130312);黑龙江科技学院青年教师基金(No.2006-12)

摘　　要：采用长脉冲激光对蓝宝石晶体在不同的保护气体作用下切割获得的断口进行了研究。Nd∶YAG脉冲激光分别在N2、Ar、O2保护气氛下对蓝宝石晶体的(0001)面上以相同的工艺参数进行切割。蓝宝石切割断口的物相和形貌分别采用XRD和SEM进行表征。结果表明:在保护气体作用下,Ar保护气氛下的切割深度最大,断口平整,有金属光泽,检测断口处以多晶α-Al2O3相为主相,并有少量的Al相;N2保护下断口无金属光泽,有粉化现象,存在多晶α-Al2O3相为主相,并有少量的AlN相;O2保护气下切割深度最浅,而且断口表面粉化严重,检测出以多晶α-Al2O3相为主相,三种切痕条纹均与激光的切削方向相反。Fracture surface of sapphire cut by long pulse laser under different shroud gas was investigated. （ 0001） plane of sapphire was cut by long pulse Nd∶ YAG laser with same parameters under N2,Ar,O2 shroud gas. The phase and morphology of fracture surface were characterized by XRD and SEM,respectively. The results showed that cutting depth of sapphire under Ar gas is the largest,and fracture surface for sapphire is much flat with metallic-colored,and the dominant phase is polycrystaline α-Al2O3 with a small quantity of metallic Al phase; fracture surface under N2 gas is powdered without metallic-colored,and the dominant phase is polycrystaline α-Al2O3 with a small quantity of AlN phase; cutting depth of sapphire under O2 gas is smallest,and powdered seriously with polycrystalline α-Al2O3,the directions of three kinds of cutting stripes are all reverse to laser cutting direction.

关 键 词：蓝宝石 激光切割 保护气 

分 类 号：O786[理学—晶体学]