MEMS系统级仿真中的一种变截面梁建模方法  

System-Level Modeling Method of Variable Cross-Section Beams

作　　者：郝星[1] 苑伟政[1] 常洪龙[1] 牛昊彬[1] 焦文龙[1] 

机构地区：[1]西北工业大学微/纳米系统陕西省重点实验室,西安710072

出　　处：《微纳电子技术》2010年第8期484-489,502,共7页Micronanoelectronic Technology

基　　金：国家高技术研究发展计划(863计划)资助项目(2007AA04Z347;2009AA04Z320)

摘　　要：根据矩阵结构分析理论和弹性力学理论建立了一种宽度随长度线性变化的变截面线性梁力学模型,采用硬件描述语言实现了其参数化系统级组件。基于该组件进行的系统级仿真结果与有限元仿真结果相比,静态分析和频域分析的最大误差分别为0.75%和0.84%。含变截面悬臂梁的蟹腿式平面微加速度计的系统级仿真结果与有限元仿真结果相比,频域和时域分析的最大误差分别为3.60%和3.65%;系统级时域分析耗时仅为4min,而有限元则为56min,表明在保证较高仿真精度的前提下,系统级仿真速度相比有限元提高了近10倍。Based on the theory of matrix structural analysis and theory of elasticity,a mechanical model of a variable cross-section linear beam was built,the beam width changed linearly along with the length,and its parameterized system-level component was established by hardware description language.The system-level simulation results of the cantilever beam based on the component were compared with the finite element simulation results,the maximum errors of the static analysis and frequency domain analysis were within 0.75% and 0.84%,respectively.Using the system-level components of the anchor,force,mass,straight comb,variable cross-section beam and so on,a system-level model of the planar crab-leg micro accelerometer was established and simulated in Zeni-VLG.The simulation results of the accelerometer were compared with the finite element simulation results,the maximum errors of the frequency domain analysis and time domain analysis were within 3.60% and 3.65%,respectively.The consumed time of the time domain analysis for the system-level simulation was only 4 min,while that for the finite element simulation was 56 min.The result indicates that the speed of the system-level simulation is increased nearly 10 times compared to that of the finite element under the condition of high simulation accuracy.

关 键 词：微机电系统(MEMS) 系统级建模 变截面梁 矩阵结构分析理论 加速度计 

分 类 号：TH703[机械工程—仪器科学与技术]