利用Zernike系数对离轴三反射系统进行计算机辅助装调  

Computer-aided alignment of off-axis three-mirror system by using Zernike coefficients

作　　者：巩盾[1,2] 田铁印[1] 王红[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所光学系统先进制造技术中国科学院重点实验室,吉林长春130033 [2]中国科学院研究生院,北京100039

出　　处：《光学精密工程》2010年第8期1754-1759,共6页Optics and Precision Engineering

基　　金：中国科学院三期创新工程资助项目

摘　　要：针对离轴三反光学系统检测和装调的复杂性,提出了一套结合了干涉测量技术的计算机辅助装调方法。采用多视场ZYGO干涉仪自准干涉检验各种失调量产生的残余像差,得到表征系统失调量引起残余像差的一系列Zernike系数,利用Zernike系数与Seidel像差系数之间的相关性将之转化为几何像差作为校正对象。由光学设计软件求得与系统失调量相关的灵敏度矩阵,并确定对残余像差影响最敏感的失调量。当失调量被确定后,将调整后的结果再次代入光学设计软件进行验证。多次迭代后,得到系统的RMS值<0.04λ的良好结果,证明了这种指导装调的方法是行之有效的。A computer-aided alignment method in combining with the interferometry was proposed to optimize the detection and alignment of an off-axis three mirror system. By using a multi-fields ZYGO interferometer, a series of Zernike coefficients were obtained to express the incorrect parameters of the system, which were then transformed into geometric aberrations as the corrected objects based on the dependence of Zernike coefficents on Seidel aberrations. Furthermore, an optical design software was used to derive the sensitivity matrix related to the incorrect parameters and to determine the incorrect parameter mostly sensitive to the redual aberration. Consequently, the adjusted result was brought into the software to verify the selection of incorrect parameters. Experimental results show that the RMS value of the system is lower than 0.04λ, after iterations, which proves the effectiveness of the method in alignment guidance.

关 键 词：离轴三反系统 计算机辅助装调 干涉检验 灵敏度矩阵 

分 类 号：V248.3[航空宇航科学与技术—飞行器设计] TP391.7[自动化与计算机技术—计算机应用技术]