基于光学法表面粗糙度的测量研究进展  

Progress of Surface Roughness Measurement Based on Optical Method

作　　者：刘晨[1] 卢荣胜[1] 陈磊[2] 王骏武[1] 

机构地区：[1]合肥工业大学仪器科学与光电工程学院,合肥230009 [2]南京理工大学电子工程与光电技术学院,南京210094

出　　处：《半导体光电》2010年第4期495-500,共6页Semiconductor Optoelectronics

基　　金：国家自然科学基金资助项目(50875074);江苏省"六大人才高峰"资助项目(06-E-030)

摘　　要：表面粗糙度是机械加工中描述表面微观形貌最常用的参数,随着现代工业对表面粗糙度精度的要求越来越高,提出了许多新的测量方法特别是光学法。介绍了测表面粗糙度的光学方法:聚焦法、干涉法、散射法和散斑法,分析了它们各自的原理和优缺点及研究概况,在此基础上提出了一种新的光学测量方法——计算机纹理分析方法。Surface roughness is a basic parameter in describing the micro-profile of surface in machining.As the accuracy demand for surface roughness in modern industry is higher and higher,a number of new measurement methods,especially optical method were put forward.In this article,introduced are four commonly used optical methods in surface roughness measurement：focus method,interferometry method,scattering method and the speckle method,and their respective advantages,defects and study progresses are reviewed.On this base,a new kind of optical measurement method named computer texture analysis method is put forward.

关 键 词：表面粗糙度 光学法 测量 

分 类 号：TN247[电子电信—物理电子学]