一种三维Mach-Zehnder型抗共振反射光波压力传感器  

Design of 3DARROW Based Mach-Zehnder Pressure Sensor

作　　者：禹忠[1] 蒋庄德[1] 李蓉[2] 王海容[1] 

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,西安710049 [2]西安机电信息研究所,西安710065

出　　处：《半导体光电》2010年第4期526-529,534,共5页Semiconductor Optoelectronics

基　　金：国家"863"计划项目(2009AA04Z330);国家自然科学基金项目(50535030)

摘　　要：为了缩短传感器尺寸,提高耦合效率,提出了一种三维Mach-Zehnder型抗共振反射光波(ARROW)压力传感器。该传感器为一个金属分割的层叠ARROW结构以及两个3dB垂直耦合器组成的Mach-Zehnder干涉仪。利用有限元方法(FEM)研究、分析了硅弹性膜片应力分布,确定传感器的结构设计参数。使用BPM分析由光弹性效应引起输出变化及其与压力之间的关系。结果表明,该传感器可通过调整垂直耦合器的长度来调节耦合效率,无需弯曲波导,可降低器件尺寸,实现压力检测。The BCB/SiO2vertically coupling ARROW pressure sensor is presented to reduce the coupling length and improve the coupling efficient.The sensor consists of two stacked ARROW separated by the metal film and two 3dB vertical coupler.The structure parameters of the ARROW are studied by the finite element method.The index distribution by the stress on the sensing arm is calculated to design the structure parameters.The relationship between pressure and the output change in the sensing arm is finally analyzed by the beam propagation method（BPM）.The Simulated results obtained for this device represent a significant improvement in performance by adjusting the second clad of the upper waveguide.The device size is reduced without bend coupling waveguide and the pressure measurement is realized.

关 键 词：抗共振反射光波导 压力传感器 有限元方法 束传播法 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]