超窄带梳状滤波器固体腔的厚度测量方法研究  

Application and Research of Fabry-Perot(F-P) Interference Principle in Highness Precision Measurement System

作　　者：邓春林[1,2] 周凤岐[1] 蔡伟[2] 张志利[2] 

机构地区：[1]西北工业大学精确制导与控制研究所,西安710072 [2]第二炮兵工程学院,西安710025

出　　处：《半导体光电》2010年第4期625-628,共4页Semiconductor Optoelectronics

摘　　要：运用法布里-珀罗(Fabry-Perot)干涉技术,将被测元件等效成测量系统的干涉腔,采用相邻干涉极值的判定依据,实现了对固体腔型超窄带梳状滤波器组成元件——未镀膜层固体腔(熔融石英)的高精度厚度测量。该光学测量系统结构简单、温度稳定性好、成本低,完全可以实现以往需采用光谱分析仪才能完成的超精细测量。According to the theory of Fabry Perot（F-P）interference,choosing flat glass（SiO2）as interferometric cavity of the measurement system,adopting the method of measuring the extremum between two nearby interfered lights,which implemented the measurement of no plating membrane light filter.It is the most importance part of the new ultra-narrow bandwidth filter.The accuracy of the optical measurement system with configuration simpleness,having strong ability of anti-reflective films and low-cost reaches subnanometer level,which ever just can be done using the expensive spectrum analyzer.

关 键 词：梳状滤波器 光学测量 DWDM F-P法珀干涉 

分 类 号：TN249[电子电信—物理电子学]