高矫顽力SmCo/Cr薄膜的制备、结构及磁性  

Preparation,Microstructure and Magnetic Properties of High-Coercivity SmCo/Cr Film

作　　者：严格[1,2] 刘湘华[1,2] 崔利亚 周少雄[1,2] 郑鹉 王艾玲[1,2] 陈金昌[1,2] 

机构地区：[1]北京钢铁研究总院非晶中心 [2]首都师范大学物理系

出　　处：《功能材料》1999年第3期254-255,共2页Journal of Functional Materials

基　　金：国家科委九五科技攻关项目

摘　　要：通过磁控溅射采用基板水冷方法制备ＳｍＣｏ／Ｃｒ双层膜。薄膜的成分及厚度、薄膜的制备条件，如溅射时的氩气压对薄膜的磁性有较大的影响。通过仔细控制这些参数，制备出矫顽力高达１８１ｋＡ／ｍ的薄膜。SmCo/Cr bilayer films were prepared on the water-cooled substrates by multigun dc magnetron sputtering system.The composition of SmCo layer and the preparation conditions,such as Argon pressure during sputtering and the individual layer-thickness of SmCo and Cr layers,have strong effect on the magnetic properties.By adjusting these variables carefully,the films with the coercivity of 181kA/m can be prepared.

关 键 词：磁性薄膜 矫顽力 制备 磁记录介质 磁性 结构 

分 类 号：TQ586[化学工程—精细化工]