一种实现纳米超微定位和超微加工的新方法  

NEW METHOD FOR POSITIONING CONTROL AND NANOFABRICATION

作　　者：禹国强[1] 胡小唐[1] 刘安伟[1] 

机构地区：[1]天津大学精密仪器与光电子工程学院

出　　处：《天津大学学报》1999年第3期308-311,共4页Journal of Tianjin University(Science and Technology)

基　　金：国家自然科学基金;微米/纳米技术国防预研-微机理研究专项青年基金

摘　　要：介绍了一种采用双单元扫描隧道显微镜实现纳米级超微定位和超微加工的新方法．双单元扫描隧道显微镜由两个Ｚ向同轴ＳＴＭ单元上下组合而成，分别作为样品测量加工单元与参考定位单元，两者共用一个ＸＹ扫描器．参考定位单元以规则的晶格空间为参考，采用原子阵列伺服寻踪和针尖锁定到原子的技术，可以实现纳米级超微定位；A new method for positioning control and nanofabrication using a dual tunneling unit STM (DTU STM) is described.One single XY scanner is used in the DTU STM,incorporating two tunneling units (positioning unit and fabrication unit) in which the two tunneling points exist on a single Z axis.with the positioning unit,the ultra micropositioning in nm order can be controlled by the methods of servo tracking of atomic arrays and position lock of a tip over an atom;while with the fabrication unit which keeps the same accuracy as the positioning unit,the nanometer scale structures on th surface of samples can be formed by applying voltage pulses between the tip and the sample.

关 键 词：扫描隧道显微镜 超微加工 纳米级超微定位 

分 类 号：TN405[电子电信—微电子学与固体电子学] TN16