分解工艺制备电磁兼容用高阻抗铁氧体薄膜  

High Resistive Ferrite Films by a Solution Process for Electromagnetic Compatible Devices

作　　者：张瑞刚 

出　　处：《电子材料与电子技术》2010年第3期10-14,共5页Electronic Material & Electronic Technology

摘　　要：具有高阻抗和良好的耦合类噪声抑制能力的Mn—Zn铁氧体薄膜，可以采用旋转喷镀铁氧体镀层的方法制备。该方法制备的薄膜是单相尖晶石结构排列的晶体，呈极小的圆柱结合形态，因而具有高阻抗。通过改变化学成分，薄膜会具有不同的阻抗，为了研究热处理作用，我们测试了薄膜在制备过程中的反射系数（S11）和传导系数（S21）。当阻抗在2×10^5Ω/sq以上，测试频率在50MHz～10GHz之间时，S11和S21表现出一致性，这对于耦合类型的噪声抑制器是非常理想的。Mn - Zn ferrite films with high resistivity and good noise suppressing ability for use as ＇ coupling - type noise suppressors＇ has been prepared by the spin- spray ferrite plating. The prepared films were crystalline and exhibited single - phase spinel structure. The films had an ＇ integrated nano - columnar＇ morphology that resulted in a very high resistivity. Further, by varying the chemical composition, films with varying resistivity were prepared, the reflection and transmission coefficients, S11 and S S12, were measured for studing the effect of heat treatment. When the resistivity was above 2 × 10^5Ω/sq, S11 and S12 exhibited uniform profiles throughout the measurement frequeney（50MHz- 10GHz）,which is ideal for the ＇coupling- type noise suppressor＇.

关 键 词：阻抗 铁氧体薄膜 噪声抑制器 

分 类 号：TN03[电子电信—物理电子学]