超精密快刀伺服加工复杂光学面形的技术研究  

Study on Machining Technologies of Complex Optical Surfaces by Using Ultraprecision Fast Tool Servo

作　　者：朱登超[1] 王贵林[1] 杨海宽[1] 

机构地区：[1]国防科学技术大学,长沙410073

出　　处：《机械工程师》2010年第9期3-5,共3页Mechanical Engineer

摘　　要：超精密快刀伺服加工技术适用于复杂面形光学零件的高效优质加工。文中通过分析快刀伺服加工的控制结构、压电陶瓷驱动性能,进行了超精密快刀伺服装置的设计与研制,建立了其传递函数模型。最后完成了典型复杂面形光学零件的加工试验,并对加工结果进行测试与分析,测试结果表明满足了设计的性能指标要求。Optical components with complex surfaces can be manufactured efficiently and accurately by using uhraprecision Fast Tool Servo （FTS） technologies. In this paper, through the analysis of control system of FTS and the driving performances of piezoelectric ceramic （PZT）, a set of FTS device is designed and developed, and the transfer function model is built. After the machining experiments of typical optical components with complex surfaces, the results are tested and analyzed, which indicate that the performances are satisfied.

关 键 词：快刀伺服 复杂面形 压电陶瓷 传递函数 

分 类 号：TH161[机械工程—机械制造及自动化]