MEMS金属微构件的激光微喷丸强化技术分析与展望  

Analysis and development of microscale laser shock peenin oriented metalic components in MEMS

作　　者：樊玉杰[1] 周建忠[1] 黄舒[1] 卫登辉[1] 王敏[1] 

机构地区：[1]江苏大学机械工程学院,镇江212013

出　　处：《激光技术》2010年第5期665-669,共5页Laser Technology

基　　金：教育部博士点基金资助项目(200802990004);江苏省高校自然科学基金重大项目基金资助项目(08KJA460002);江苏省自然科学基金资助项目(BK2009219);江苏大学校科研项目基金资助项目(CX08B_06x)

摘　　要：介绍了适用于金属微构件处理的激光微喷丸技术,通过控制工艺参量和合理的路径规划,在试件表面产生有益的残余压应力分布,能有效提高工件的抗疲劳和磨损性能。概述了微喷丸技术的研究现状,总结了激光微喷丸的机理、关键技术和影响因素,分析了激光微喷丸研究中存在的问题,为今后激光微喷丸技术的进一步研究提供指导。Laser shock peening suitable for metal micro components was introduced. The desirable compressive stress distribution might be induced by the control of process parameters and reasonable path, so the wear and fatigue resistance can be improved. The research status, mechanism, key technology and influence factors of microscale laser shock peening were summarized and the problems in microscale laser shock peening were analyzed, which provides guidance for further research.

关 键 词：激光技术 激光微喷丸 微构件 残余应力 疲劳性能 

分 类 号：TN249[电子电信—物理电子学] TG156.99[金属学及工艺—热处理]