非球面液滴透镜在LD光束整形中的应用  

Application of aspherical liquid lens in laser diode beam shaping

作　　者：丁志中[1] 王克逸[1] 詹珍贤[1] 

机构地区：[1]中国科学技术大学精密机械及精密仪器系,安徽合肥230027

出　　处：《红外与激光工程》2010年第4期623-626,共4页Infrared and Laser Engineering

基　　金：国家863计划资助项目(2006AA04Z333);中国科学技术大学研究生创新基金资助项目(KD2007041)

摘　　要：根据电场作用改变液滴面形的原理,提出直接在半导体激光管封装窗口上制作非球面透镜来准直半导体激光器的光束。在研制的半导体激光器准直和实时检测系统中,使用SU-8光刻胶滴于半导体激光器封装窗口上,同时限制液滴底面轮廓,用电场操控液滴透镜的面形,通过实时检测系统检测到较好的光束状态时,采用紫外光固化技术使液滴透镜固化成固体透镜,在半导体激光管封装窗口上制作出具有两种焦距的准直透镜,从而完成准直半导体激光器的制作。实验表明:所制作出的液滴透镜可同时对相互垂直方向上不等的发散角进行准直,发散角分别可达到θ┴=14 mrad,θ襓=10 mrad。A novel method of LD beam collimation by fabricating aspherical micro-lens at the LD＇s radiant window was proposed in this paper based on the principle that the shape of the liquid lens could be manipulated by the application of an electrostatic force.An experiment system that could fabricate aspherical liquid lens and in situ measure its optical parameters was developed.The Ultra Violet（UV） curable polymer droplet（SU-8 is used here） was dropped at the LD＇s radiant window and the underside of the droplet was restricted so that two different focal lengths could be obtained in one liquid lens.Electrostatic forces were employed to manipulate the shape of liquid polymer lens and its focal length.UV light is used to solidify the liquid polymer lens when a good collimating state was detected.Therefore,a collimated LD is finished.Through experiment,a collimating lens that has two different focal lengths was fabricated at the LD＇s radiant window,and it could collimate two different divergence angles simultaneously.The two divergence angles obtained in our experiment are θ┴=14 mrad and θ‖=10 mrad.

关 键 词：光束准直 半导体激光器 非球面液滴透镜 电场作用 

分 类 号：TN256[电子电信—物理电子学] TN248.4