金属基类石墨复合膜微观组织结构分析  

Analysis on Microstructure of Graphite-like Composite Coating on Metal Substrate

作　　者：王佐平[1] 邢建东[1] 胡奈赛[1] 王伟[2] 

机构地区：[1]西安交通大学金属材料强度国家重点实验室,陕西西安710049 [2]中国船舶重工集团公司第十二研究所,陕西兴平713102

出　　处：《热加工工艺》2010年第16期87-90,共4页Hot Working Technology

摘　　要：应用非平衡闭合磁控溅射技术在渗碳淬火基体上制备了类石墨复合膜,用SEM、AFM和TEM分析了金属基类石墨复合膜的表面形貌和截面结构,并测试了类石墨复合膜的摩擦学特性。结果表明,类石墨复合膜是由柱状多晶过渡层+非晶梯度层+类石墨复合层组成的多层结构。The graphite-like composite coating was deposited by closed field unbalanced magnetron sputter iron plating technique.The surface and fracture morphology of the coating were observed by SEM and AFM,the cross-sectional structure was analyzed using TEM.The tribological properties curve of the coating was also tested.The results indicate that the graphite-like composite coating is made up of colummnar polycrystalline chromic metallic transition layer,amorphous gradient layer and graphite-like composite coating.

关 键 词：类石墨复合膜 渗碳淬火 非平衡闭合磁控溅射 

分 类 号：TB331[一般工业技术—材料科学与工程]