ITO薄膜导电性能对温度的响应  

Effect of Temperature on Conductive Properties of ITO Films

作　　者：况琦[1] 杨斌[1] 刘婧[1] 

机构地区：[1]浙江理工大学先进纺织材料与制备技术教育部重点实验室,杭州310018

出　　处：《浙江理工大学学报（自然科学版）》2010年第5期721-724,共4页Journal of Zhejiang Sci-Tech University(Natural Sciences)

基　　金：浙江省自然科学基金(Y407195);长江学者和创新团队发展计划资助项目(IRT0654)

摘　　要：以无机盐为原料,采用溶胶-凝胶法制得透光导电ITO薄膜。用温度控制器改变ITO薄膜温度,用SZT-2四探针测试仪测膜的方阻。结果表明:在温度的循环变化过程中,ITO薄膜的方阻随着温度的上升而降低,在温度降低时沿原曲线返回,且重演性好,高温时电阻响应的灵敏度较大,可在使用过程中起到温度的传感作用。The transparent and conductive ITO thin films are prepared by sol-gel method using inorganic salts as raw materials.The temperature of ITO thin films is changed by temperature controller.The sheet resistance is tested by four-probe-method.The result shows that the sheet resistance of ITO thin films reduces generally with increasing temperature of ITO thin film among the circulation.It goes back over its course with decreasing temperature,and its repeatability is good.The sensitivity of sheet resistance response is high at high temperature,this can act as transmission of temperature.

关 键 词：掺锡氧化铟薄膜 溶胶凝胶法 方阻 温度 

分 类 号：TN304.055[电子电信—物理电子学]