微波混合集成电路的ESD设计  

Design of ESD for Microwave Hybrid Integrated Circuits

作　　者：李群春[1] 王乔楠[1] 

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051

出　　处：《半导体技术》2010年第9期939-943,共5页Semiconductor Technology

摘　　要：主要介绍了微波混合集成电路ESD设计的一些探索工作,对两种不同功能和形式的混合集成电路的抗静电能力和电路中的薄弱部位进行了研究和分析。依据实验摸底结果并结合电路的自身特点,有针对性地进行ESD保护电路设计,既有效提高了电路的抗静电能力,又保证电路的微波电性能不受较大的影响。试验结果表明,运用这种电路后,使得HE393B宽带放大器防静电能力从300 V提高到1 500 V,HE010电压产生器达到800 V。Some exploratory research of ESD design in microwave hybrid integrated circuit was introduced, the weak area and electrostatic prevention ability of the double microwave hybrid integrated circuits were analyzed and researched which owned different functions and forms. According to the test results and the self-feature of the circuits, the ESD protective circuits were added in the hybrid integrated circuits to increase the electrostatic prevention ability and affect the microwave characteristicless. The results show that the electrostatic prevention ability of the broadband AMP HE393B is up to 1 500 V from 300 V and the voltage generation HE010 is also up to 800 V.

关 键 词：微波混合集成电路 电压产生器 ESD 保护电路 

分 类 号：TN454[电子电信—微电子学与固体电子学]