氮化硅陶瓷表面DLC膜的制备及摩擦性能研究  

Preparation and Tribological Properties Research of DLC Film on the Surface of Si_3N_4 Ceramics

作　　者：荆翠妮[1] 古乐[1] 张传伟[1] 唐光泽[2] 王黎钦[1] 

机构地区：[1]哈尔滨工业大学机电工程学院,黑龙江哈尔滨150001 [2]哈尔滨工业大学材料科学与工程学院,黑龙江哈尔滨150001

出　　处：《润滑与密封》2010年第9期21-25,共5页Lubrication Engineering

基　　金：国家自然科学基金项目(50875058);国家973计划资助项目(2007CB607602)

摘　　要：利用等离子体基离子注入与沉积技术,在氮化硅陶瓷片表面制备200～400nm的类金刚石碳膜。测试薄膜的厚度、表面形貌、结构、膜基结合力,利用球盘试验机考察DLC膜的摩擦性能。结果表明:沉积薄膜均匀光滑;薄膜的硬度和弹性模量与基体差异较小,膜基结合力强;DLC膜具有较低的摩擦因数,抗磨性能优异。Based on the plasma based ion implantation and deposition technology, diamond like carbon films about 200 to 400 nm thickness on the surface of Si3N4 ceramic disks were prepared. The properties of the film were tested, such as film thickness, surface topography, structure, cohesion between film and substrate material. The tribological properties were investigated on ball-on-disk wear tester. Results show that the DLC films are well-distributed, which have lower friction coefficient and good abrasion resistance ; the hardness and elasticity modulus of film are almost the same with the basal body, the cohesion between film and substrate material is good.

关 键 词：DLC膜 制备工艺 摩擦性能 

分 类 号：TH117[机械工程—机械设计及理论]