狭缝宽度的衍射法测量研究  

Investigation of Diffraction Method for Slit Width Measurement

作　　者：何波[1] 郑小兵[1] 李新[1] 戚涛[1] 邹鹏[1] 

机构地区：[1]中国科学院安徽光学精密机械研究所中国科学院通用光学定标与表征技术重点实验室,安徽合肥230031

出　　处：《大气与环境光学学报》2010年第5期380-389,共10页Journal of Atmospheric and Environmental Optics

基　　金：国家863计划(2007AA12Z106);安徽省自然科学基金(090412042)资助

摘　　要：针对太阳绝对光谱辐照度仪研制过程中入射狭缝光阑高精度测量的实际需求,研制了基于激光衍射的狭缝宽度检测系统。该系统以激光作为光源,使用NMOS线列探测器作为检测传感器、以混合信号单片机C8051F为主控处理器,结合CPLD作为时序发生器和片上12位模数转换器,并采用最小二乘法对测量数据进行拟合提取条纹中心位置,实现了狭缝的高精度检测。系统可检测狭缝范围为0.02～0.5 mm,并在对太阳绝对光谱辐照度仪中标称为0.1 mm的狭缝测量中获得了2.5×10^(-3)μm测量不确定度.A diffraction-based opto-electronic system is developed for precise measurement of entrance slit width of solar irradiance radiometer. The system use laser as light source, a NMOS linear array as opto- electronic sensor, a mixed-signal MCU C8051F as host controller, a CPLD as timing generator and on-chip 12-bit ADC. In addition, to achieve high-precision measurement, it uses least-squares method fitting the measured data to extract strip center location. Slit width can be measured within the range from 0.02 mm to 0.5 mm, in the measurement of entrance width of solar irradiance radiometer whose nominal width is 0.1 mm, the total uncertainty is 2.5× 10-3 um.

关 键 词：狭缝测量 NMOS线列探测器 光电检测系统 最小二乘法 

分 类 号：O436.1[机械工程—光学工程]