基于多层序列图像的三维表面粗糙度检测  

Three-dimensional surface roughness measurement based on sequence multi-images

作　　者：乐静[1] 杨洁[1] 王建[1] 李乐[1] 

机构地区：[1]西安理工大学机械与精密仪器工程学院,西安710048

出　　处：《仪器仪表学报》2010年第9期2036-2041,共6页Chinese Journal of Scientific Instrument

基　　金：陕西省教育厅自然科学基金(09JK624);陕西省自然科学基金(SJ08E219);西安理工大学校博士启动基金资助项目

摘　　要：提出了一种非接触检测工件表面粗糙度的新方法。利用光学测量显微镜景深小这一特点,将CCD沿金属表面垂直方向等间距拍摄部分聚焦的序列图像,然后采用方差聚焦测度算子确定融合图像中每点所属的高度层次,利用高斯插值方法计算微观物体表面更准确的高度信息,重构了三维微观形貌。同时探讨了三维表面粗糙度参数表征的可行性,通过与二维表面粗糙度参数的对比实验,验证了其正确性和可靠性。该方法对表面粗糙度的在线检测和更完整地表征3D形貌等方面具有参考价值。A novel non-contact detection method of work-piece surface roughness is presented.Utilizing the feature that optical measuring microscope has small depth of field,sequential images are captured respectively in partial focus when the CCD moves by uniform step distance perpendicular to the metal surface.The height level of each pixel in the fusion image is determined using the variance focus measure operator applied to every frame.Gaussian interpolation method is used to calculate the accurate height information and a three-dimension micro-topography is reconstructed.Meanwhile the feasibility of three-dimension surface roughness representation is discussed.Through comparison experiment with two-dimension surface roughness parameter,the correctness and reliability of the new method are validated.Research results demonstrate that the proposed method has significant meaning for realizing on-line measurement of surface roughness and completely representing three-dimension morphology.

关 键 词：表面粗糙度 方差融合 聚焦测度算子 三维重构 

分 类 号：TB921[一般工业技术—计量学]