正交偶极分形槽红外波段光学特性研究  

Transmission Properties of Cross Dipole Fractal Slits for Infrared Wavelengths

作　　者：孙梅[1] 徐德刚[2] 郭培源[1] 姚建铨[2] 

机构地区：[1]北京工商大学计算机与信息工程学院,北京100048 [2]天津大学精仪学院激光与光电子研究所光电信息技术科学教育部重点实验室,天津300072

出　　处：《激光与光电子学进展》2010年第9期73-77,共5页Laser & Optoelectronics Progress

基　　金：国家973计划(2007CB310403)资助课题

摘　　要：利用电子束直写系统(EBL)和反应离子束刻蚀系统(RIE)制作了两级正交偶极分形槽样品,其中空气槽的宽度为0.12μm,两级正交偶极分形槽结构中第一级和第二级的臂长分别为1.8μm和0.8μm。样品总体尺寸为35μm×35μm,是由20×20个正交偶极排列而成的,每个正交偶极之间的周期为1.5μm。采用实验和传输矩阵(TMM)理论模拟的方法研究了分形槽结构在近红外和中红外波段的透射曲线,正交偶极分形槽结构在1.7μm和5.2μm波长处得到两个增强透射峰,其透射率分别为36%和49%。理论模拟结果与实验测量结果基本一致。证明了两级正交偶极分形结构中自相似性的存在。Two-stage cross dipole fractal slits are fabricated by electron beam lithography（EBL）and reactive ion etching（RIE）system,and the width of the fractal slits is about 0.12 μm.The primary and secondary cross dipole arm lengths of the fractal unit are 1.8 μm and 0.8 μm,respectively.The overall size of the sample used in the experiment is 35 μm×35 μm,which is composed of 20×20 periodic array of two-stage cross dipole fractals.The period of the fractal lattice is 1.5 μm.The transmission spectrum of the two stages cross dipole fractal slits is simulated using the transfer-matrix method（TMM）in the near-and mid-infrared region.There are two enhanced transmission peaks at 1.7 μm and 5.2 μm with the transmission coefficient of 36% and 49%.The measured transmission spectrum agrees well with the simulation.

关 键 词：分形结构 正交偶极 自相似性 传输矩阵 

分 类 号：O433.1[机械工程—光学工程] O472.3[理学—光学]