氮化铝陶瓷基片热导率的理论分析  

Theoretic Analysis on Thermal Conductivity ofAIN Ceramic Substrate

作　　者：梁秀红[1] 梁广川[1] 梁金生[1] 

机构地区：[1]河北工业大学材料研究中心

出　　处：《河北工业大学学报》1999年第2期20-24,共5页Journal of Hebei University of Technology

基　　金：河北省自然科学基金

摘　　要：对氮化铝陶瓷基片的热导率进行了实验和理论分析。结果证实，烧结初始氧含量低的氮化铝粉体，加入较多的Ｙ２Ｏ３作烧结助剂才能获得最大热导率，并且其值较高；随着氧含量的增加，可达到的最大热导率逐渐降低，而需加入的Ｙ２Ｏ３量减少。同时，晶间相的存在对热导率有重要影响。文中推导出热导率与氧含量和Ｙ２Ｏ３添加量之间的定量关系式并指出，获得最大热导率必须使用氧含量低的陶瓷粉本，同时根据氧含量的大小来确定Ｙ２Ｏ３的添加量。The experiments and theoretic analysis on the thermal conductivity of AIN ceramic substratewere carned out. All the results verified the followings viewpoints: the maximum thermal conductivity ofAIN with lower oxide content was higher and thermal conductivity decreased with the increasing of oxide con-tent in AIN ceramic: acted as sintering addition should be mixed more for the AIN powder with loweroxide content . In the meantime, the intererystaline phase affected the thermal conductivity of AIN signifi-cantly. The quantitative relationship between thermal conductivity and oxygen, was developed. Ac-cording to the results, the ceramic powder with lower oxygen content should be used to get high maximumthermal conductivity . The additional Y2O3 content should adjust to different oxygen content.

关 键 词：氮化铝陶瓷 基片 热导率 晶间相 氧杂质 

分 类 号：TQ174.758[化学工程—陶瓷工业]