划片机中的新型高刚度动静压气体径向轴承  

A New Type of High Stiffness Dynamic and Static Pressuried Journal Air Bearing Used in Sophisticated Dicing Saw

作　　者：魏明明[1] 卢志伟[1] 刘波[1] 张君安[1] 

机构地区：[1]西安工业大学机电工程学院,西安710032

出　　处：《轴承》2010年第10期5-7,共3页Bearing

基　　金：陕西省教育厅专项科研计划项目(09JK484)

摘　　要：为了提高精密划片机主轴系统的旋转精度和刚度,设计了一种带有可变节流器与可变均压槽相结合的动静压气体径向轴承,通过气膜压力反馈使弹性薄板产生变形,控制节流器与均压槽参数发生变化,从而提高轴承刚度。详细介绍了该轴承的结构、工作原理与工作过程,并与普通双排八孔动静压空气径向轴承的承载力和刚度特性进行了对比试验分析,结果表明该新型轴承的承载力和刚度均明显高于普通轴承。In order to improve the rotation accuracy and stiffness of spindle system of sophisticated dicing saw,a new type of high stiffness dynamic and static pressuried journal air bearing with variable restrictor and pressure groove is designed.The working principle of the bearing is that the air pressure reaction in the bearing gap makes the elastic membrane to take place deformation,which brings the parameter of restrictor and pressure groove under control,increasing the stiffness of this bearing.The structure,working principle and working process of this bearing are introduced in detail.The plain bearing and this new type of high stiffness bearing are compared experimentally.The results show that both the carrying capacity and stiffness of this new bearing are higher than those of plain bearing.

关 键 词：气体轴承 刚度 承载力 气膜压力反馈 弹性薄板 节流器 均压槽 

分 类 号：TH133.35[机械工程—机械制造及自动化]