基于光电技术的圆度测量及最小二乘评定  

Measuring Circularity Based on Photo Electricity Technology and Evaluation by Least Squares Mean Circle Method

作　　者：纪小辉[1] 陈彤[1] 

机构地区：[1]西安工业大学光电工程学院,西安710032

出　　处：《科学技术与工程》2010年第27期6741-6744,共4页Science Technology and Engineering

摘　　要：提出了一种基于光电技术测量圆度误差的新方法。该方法将圆度误差转化为轴上物点的移动,利用理想光组轴向放大率理论来实现微位移的放大,并通过采用位置敏感探测器将光斑像点的位移转化为电信号的输出,从而实现位移与电信号的转化;在测量圆度的同时,采用圆光栅来测量工件转角,实现整周的圆轮廓实时记录;对于圆度误差的评定采用最小二乘法,并经过对比实验,证实该方法的测量原理可行,实现了圆度误差的整周连续测量,其测量精度可以达到1μm。A new method of measuring the roundness error based on photo electricity is proposed.Roundness error was converted to the displacement of a point on optical axial by this method,to amplify micro-displacement based on ideal optical system longitudinal magnification theory.The displacement fluctuation of light spot image is converted to electric signal outputting by PSD（Position Sensitive Detector）.The rotation angle of the piece is measured by circular optical grating when measuring the circularity of the piece,thus the information of com-plete cycle outline real time can be acquired.Assessment of circularity error uses the method of least square app-roximation.The measuring method is correct by opposite experiments is verified.The goals of measuring complete cycle outline are reached,and the accuracy of circularity error is 1 μm.

关 键 词：圆度误差 轴向放大率 位置敏感探测器 最小二乘法 

分 类 号：TH161.1[机械工程—机械制造及自动化]