双纵模He-Ne激光单模干涉在大尺寸测量中的研究  

Study on precise measurement technology for large dimensions based on two longitudinal mode He-Ne laser with single-mode interferometry

作　　者：吴斌[1] 喻洪平[1] 莫莉[1] 

机构地区：[1]成都大学工业制造学院,四川成都610106

出　　处：《中国测试》2010年第5期12-14,共3页China Measurement & Test

基　　金：成都大学青年校基金重点项目(2008XZJ001)

摘　　要：采用双纵模热稳频He-Ne激光作为光源,其拍波波长作为测量大尺寸的基准,可实现大尺寸零件的精密测量。在前期研究的基础上利用其两个单模干涉实现整数倍拍波波长被测长度的确定,解决了该段长度测量精度难题,并利用激光单模干涉实现不足一个拍波波长长度的测量。该方法可实现对大尺寸工件几何尺寸的现场测量,并具有较高的精度。By using two-longitudinal mode He-Ne Laser with stable thermal frequency as light source,and its pat wavelength as measuring basis,the measurement for the length of integral pat wavelengths was achieved by two single-mode interferometry on the basis of our previous study.By this way,the accuracy problem of the measurement for this wavelelength range was resolved.In addition,the measurement for the length less than one pat wavelength can be realized by a single-mode interferometry.This method can measure the geometric dimensions of large size workpieces on site with high accuracy.

关 键 词：大尺寸 热稳频 拍波波长 单模干涉 

分 类 号：TN248.21[电子电信—物理电子学] TH741.1[机械工程—光学工程]