超疏水性薄膜在QCM传感器中的应用  

The Application of Hydrophobic Thin Film to QCM Sensor

作　　者：吴云影[1] 陈桐滨[1] 

机构地区：[1]韩山师范学院化学系,潮州521041

出　　处：《表面技术》2010年第5期111-114,共4页Surface Technology

基　　金：广东省科技厅项目(2008B080701017);日本爱知科技财团先导研究资助基金

摘　　要：采用微波等离子CVD方法在QCM传感器电极的表面沉积了一层超疏水性纳米膜(聚TMMOS有机硅氧烷),研究了其检测有机物的选择性和灵敏度。结果表明:改性的QCM电极表面选择性吸附有机物,而抑制了水分子的吸附;制得的超疏水性纳米膜的比表面积较大,使得有机物吸附量较大,提高了检测有机分子的灵敏度。该传感器能够应用于高湿度环境下有害有机物的检测。The hydrophobic nano film （trimethylmethoxysilane） was prepared on quartz crystal microbalance （QCM） sensors by means of microwave plasma chemical vapor deposition. The choice performance and sensibilisty for test organic substance were studied. The results show that： modified QCM electrode surface selectively adsorbs organic compounds to inhibit the absorption of water molecules. By controlling the film forming conditions, increased the film surface area to increase the organic matter adsorption to enhance the sensitivity of detection for organic molecules. The sensor can be used to detect of harmful organisms in high humidity environment.

关 键 词：超疏水性膜 QCM 微波等离子CVD 化学传感器 

分 类 号：TG174.442[金属学及工艺—金属表面处理] O652.2[金属学及工艺—金属学]