石英玻璃和载玻片衬底磁控溅射纳米TiO_2薄膜的光致亲水性(英文)  

PHOTO-INDUCED HYDROPHILICITY OF NANO-TIO_2 THIN FILMS ON QUARTZ GLASS AND GLASS SUBSTRATES PREPARED BY RF MAGNETRON SPUTTERING

作　　者：孟凡明[1,2,3] 鲁飞[1,3] 

机构地区：[1]安徽大学物理与材料科学学院,合肥230039 [2]三束材料改性教育部重点实验室大连理工大学,大连116024 [3]安徽省信息材料与器件重点实验室,合肥230039

出　　处：《硅酸盐学报》2010年第10期2026-2029,共4页Journal of The Chinese Ceramic Society

基　　金：安徽省高等学校省级自然科研基金(KJ2009A006Z,KJ2007B132);三束材料改性教育部重点实验室(大连理工大学)开放基金(DP1051002);安徽大学"质量工程"建设基金(XJ200907);安徽大学博士科研启动基金(02203105)资助项目;国家自然科学基金(50872001)

摘　　要：采用射频磁控溅射法在石英和载玻片衬底上淀积纳米TiO2薄膜。利用X射线衍射仪、原子力显微镜、紫外可见分光计和接触角仪对薄膜相结构、表面形貌、光学性能和光致亲水性能进行表征。结果表明:在高压汞灯的辐射下,薄膜呈现出从疏水到亲水性能的转变。TiO2薄膜的光致亲水性能与衬底有关,载玻片衬底的TiO2薄膜的光致亲水性能优于石英玻璃衬底。载玻片衬底上淀积的薄膜经高压汞灯辐射240min后呈现出超亲水性能。讨论了薄膜的能隙、Ti3+缺陷位和衬底对TiO2薄膜的光致亲水性能的影响。Nano-TiO2 thin films were deposited on quartz glass（quartz） and glass substrates by radio frequency magnetron sputtering.The phase structure,surface topography,optical properties,and photo-induced hydrophilicity of the films were characterized by X-ray diffractometer,atomic force microscope,ultraviolet-visible spectrometer,and water contact angle apparatus.It is observed that the films display transformation from poor hydrophilicity to better hydrophilicity on exposure to irradiation of high pressure mercury lamp.The photo-induced hydrophilicity of the films is related to substrate,and the photo-induced hydrophilicity of the films on glass is superior to that on quartz glass.In particular,after 240 min irradiation of high pressure mercury lamp,the films deposited on glass substrate exhibit an unexpected super-hydrophilicity.The effects of energy gap,Ti3＋ defect sites,and substrate on the photo-induced hydrophilicity of the films is discussed.

关 键 词：二氧化钛薄膜 射频磁控溅射 光致亲水性能 能隙 衬底 

分 类 号：O484.1[理学—固体物理]